Titanium Oxide Thin Films Using PlasmaResearch Stories

Se Youn Moon

Surface and Coatings Technology

Fast formation of amorphous titanium dioxide thin films using a liquidassisted plasma-enhanced deposition process in open air


This article shows a deposition method for thin films of titanium oxide that uses a plasma created in close proximity of the coating substrate.

The quality of the plasma can be characterized by monitoring the optical emission using a high-resolution spectrograph.

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