We use cookies to collect and analyze information on site performance, usage and to enhance your experience. By Clicking "OK" or by clicking into any content on this site, you agree to allow cookies to be placed. To find out more please review our Privacy Policy.


Products: PIXIS-XO Soft X-Ray Cameras

image of PIXIS-XO Soft X-Ray Cameras

X-Ray Cameras for VUV and EUV Applications

High-sensitivity, thermoelectrically cooled PIXIS-XO cameras utilize various back-illuminated and back-illuminated, deep-depletion, CCDs without antireflective coating for direct detection of the widest range of x-rays — between ~30 eV and ~20 KeV. A rotatable ConFlat flange with a high-vacuum-seal design, as well as software-selectable gains and readout speeds, make these cameras well suited for UHV applications.

The PIXIS-XO series offers the following features:

  • Broad selection of CCDs without antireflective coating (1340 x 100 to 2048 x 2048 pixel arrays; 13 x 13 µm to 20 x 20 µm pixel sizes)
  • Sensitivity in the  X-ray energy range from ~30 eV to
    ~ 20 KeV 
  • Rotatable ConFlat flange design
  • Flexible dual-amplifier readout design
  • High Speed USB 2.0 interface
  • Full experiment control via 64-bit LightField software and automation support for LabView/Matlab/Python/EPICS (optional)

Princeton Instruments LightField software now supports McPherson EUV/VUV spectrometers with PIXIS-XO and SOPHIA-XO soft x-ray cameras. Read the press release.

See soft x-rays and more.

Princeton Instruments PIXIS-XO systems are engineered to deliver the highest direct-detection performance for applications that involve x-ray spectroscopy, x-ray imaging, x-ray microscopy, x-ray plasma diagnostics, and EUV lithography.

With an extensive variety of CCD formats, 100% fill factor, low-noise electronics, and -70°C to -90°C thermoelectric cooling, PIXIS-XO cameras provide hassle-free operation in research and OEM environments.

x-ray spectroscopy


Sensitivity in X-ray energy range from ~ 30 eV to 20 KeV:
  • Covers wide variety of applications
wavelength coverage
High-speed, USB 2.0 interface:
  • Industry standard computer interface without the need for additional hardware
  • Seamless plug-and-play connectivity with the latest desktops and laptops
  • True 16-bit data transfer at 2MHz readout speed
Rotatable conflat design delivers:
  • Flexibility to align CCD X-axis to the image or spectral axis
rotatable conflat design
Flexible dual-amplifier readout design delivers:
  • Ultimate flexibility to optimize system performance
  • Lowest possible read noise
  • Highest dynamic range
  • Best linearity


sensor diagram
Powerful 64-bit software delivers:
  • Intutive and cutting edge user interface

  • Easily automates background, flatfield and defect correction

  • Universal programming interface - PICAM (64 bit) - for easy custom programming


PIXIS-XO Direct Detection X-Ray Camera model comparison and datasheets

Model Imaging Array Pixel Size Sensor Type
100B datasheet pdf 1340 x 100 20 x 20 µm back-illuminated
100BR datasheet pdf 1340 x 100 20 x 20 µm back-illuminated, deep-depletion
400B datasheet pdf 1340 x 400 20 x 20 µm back-illuminated
400BR datasheet pdf 1340 x 400 20 x 20 µm back-illuminated, deep-depletion
1024B datasheet pdf 1024 x 1024 13 x 13 µm back-illuminated
1024BR datasheet pdf 1024 x 1024 13 x 13 µm back-illuminated, deep-depletion
1300B datasheet pdf 1340 x 1300 20 x 20 µm back-illuminated
2KB datasheet pdf 2048 x 512 13.5 x 13.5 µm back-illuminated
2048B datasheet pdf 2048 x 2048 13.5 x 13.5 µm back-illuminated

Quantum Efficiency of PIXIS-XO direct detection cameras*

QE curves for PIXIS-XO cameras


*Please refer to datasheets for available CCD types in each model.

X-Ray Plasma Diagnostics
Hot and dense plasmas are of enormous interest in basic physics research because of the multitude of interesting phenomena that arise from them.

Soft X-Ray Microscopy
Soft X-ray Microscopy is used for imaging and researching the elemental composition and structure of biological samples and more.

EUV Lithography
EUV lithography is gaining popularity because it retains the look and feel of the traditional optical lithography process (i.e., utilizes the 13.5 nm wavelength) and uses the same basic design tools.

X-Ray Spectroscopy
X-ray absorption spectroscopy is an element-specific probe of the local structure of elements in a material.


B. Buades, J. Biegert et al.
Dispersive soft x-ray absorption fine-structure spectroscopy in graphite with an attosecond pulse
X-Ray spectroscopy can give element specific information about electrons in a material as well as determine information about the structure (how far are atoms apart). Researchers use attosecond pulses to dynamically measure and correlate both properties.
U. Zastrau et al.
A sensitive EUV Schwarzschild microscope for plasma studies with sub-micrometer resolution
EUV microscopy of plasmas from hydrogen jets for understanding plasma dynamics.
J. Kramer, A. Irman et al.
Making spectral shape measurements in inverse Compton scattering a tool for advanced diagnostic applications
Researchers from Germany measure the spectral shape of an X-ray beam using inverse Compton scattering to characterize a radiation source. They use an in vacuum CCD camera to record the spectra by counting single photon events.
Matthias Müller, Tobias Mey, Jürgen Niemeyer, and Klaus Mann
Table-top Soft X-ray Microscopy with a Laser-induced Plasma Source Based on a Pulsed Gas-jet
A table-top soft x-ray microscope based on a long-term stable and nearly debris-free laser plasma from a pulsed nitrogen gas jet target is presented. The microscope operates in the “water window” region at 2.88 nm wavelength. The emitted soft x-ray radiation is focused by an ellipsoidal condenser mirror into the object plane and a sample is imaged using a Fresnel zone plate onto a CCD camera. The spatial resolution of the microscope is about 50 nm demonstrated for a Siemens star test pattern.

Application Notes

High-Harmonic Generation (HHG) and High-Sensitivity, High-Speed Scientific Cameras for Applications in the Soft X-ray Energy Regime
X-ray experimental setups for individual labs continue to evolve and gain popularity...selecting the right application-appropriate camera will be imperative to capitalize fully on the benefits of these new setups

This note describes several examples of XPCS in which high-performance CCD systems from Princeton Instruments can be used to capture microscopic, low x-ray-flux images.


X-Ray Camera Brochure
Comprehensive information on direct and indirect X-ray detection technologies from Princeton Instruments. Includes related application and technical notes.


Product Manuals
Download operation manuals for Princeton Instruments cameras, spectrometers, and accessories from our ftp site.

Tech Notes

New QE Response Curves for Soft X-ray to VUV Energy Range
A Quantitative Comparison of Different Scientific CCD Types


LightField Scientific Imaging & Spectroscopy Software

LightField Scientific Imaging & Spectroscopy Software

Ground breaking software to control your Princeton Instruments systems. Now with Windows 10 support. It's like nothing you have ever experienced!

PIXIS-XB Direct Detection

PIXIS-XB Direct Detection

Direct detection x-ray cameras with integrated Be window for 3keV to 20keV detection range.

PI-MTE In-Vacuum Cameras

PI-MTE In-Vacuum Cameras

PI's smallest, in-vacuum cameras for direct detection of soft X-rays in the energy range from <30 eV to ~20 KeV



Compact liquid circulator for deep-cooled cameras for efficient cooling.

USB 2.0 Fiber Optic Interface Kit

USB 2.0 Fiber Optic Interface Kit

Extends distance between USB2.0 cameras and the host PC, by up to 500 meters

Princeton Instruments